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MCAESC
dca9c84fe4f7a11d423cb4426027ccf2
IMG_5715
維修異常介紹

AMAT MCA ESC

AMAT Endura2
OEN New or Repair
Level-1 Level-2 Level-3
Level 1 encompasses the Bellows Change and Testing This level will contain the following steps: Level Il encompasses the MCA strip and re-deposition of the MCA pads.This level will contain the following steps: When Bellows has a leaking, this level will be applicable along with Level 1 plus level 2.
     
Receipt of chucks at our facility - Logging on the serial number and generating history. Receipt of chucks at our facility- Logging on the serial number and generating history Receipt of chucks at our facility-Logging on the serial number and generating history.
Segregation - Copper ESC are isolated Segregation- Copper ESC are isolated Segregation-Copper ESC are isolated
Incoming inspection Incoming inspection Cut-off -Hloses, bias tube and bellows are sequentially cut-off
Vacuum Testing Bellows MCA stripping- The segregatedAabeled ESCs are sent out for cleaning Visual inspection - Look for defects to the puck especially on the backside (hidden within the assembly)
Change Final inspection Post strip inspection Rebuild operation _Includes disassembly and final assembly replacing old parts(Bellows)
Document upload - The on-line server files are updated Flatness Control Final inspection
Packaging/Shipment He Groove Re-mmake MCA stripping-The segregated/labeled ESCs are sent out for cleaning
  Surface Polishing Post strip inspection
  MCA deposition He Groove Re-make
  Final inspection MCA deposition
  Document upload - The on-line server files are updated Final inspection
  Packaging/Shipment Document upload The on-line server files are updated
    Packaging/Shipment

 

 

Part Number Description Level 1 Level 2 Level 3
0010-23066 High Temp ESC V V V
0010-64702 High Temp ESC V V V
0010-61288 High Temp ESC V V V
0010-27430 High Temp ESC V V V
0010-27431 High Temp ESC V V V
0010-27983 High Temp ESC V V V
0010-22985 Low Temp ESC V V V
0010-24456 Low Temp ESC V V V
0010-42030 DT Heater Cooling Plate V V X
0200-02936 DE ESC V V V
0010-31581 DT ESC V V V
0010-33071 DT ESC V V V
0010-33488 DT ESC V V V

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