AMAT Ultima HDP ESC
AMAT Ultima 8" 12"
2nd New or Repair
2nd New or Repair
| Part Name | Ultima ESC 8" Ultima ESC 12" |
Serial Number | |||||
| Part Number | 0040-18219 0040-48694 |
Inspector | |||||
| Mode | NEW | Revision Number | 0 | ||||
| INSPECTION | |||||||
| Inspection ltem | Incoming | Result | Judgement | ||||
| Dimension | Out Diameter | N/A | 233.626 | OK | |||
| Step Diameter | N/A | 197.491 | OK | ||||
| Tolal Height | N/A | 34.332 | OK | ||||
| Step Height | N/A | 12.717 | OK | ||||
| Flatness | N/A | 10 | OK | ||||
| Straightness | NU/A | 7 | OK | ||||
| Dam Height | N/A | 19 | OK | ||||
| Emboss Height | N/A | 18 | OK | ||||
| He Groove Depth | N/A | 45 | OK | ||||
| Surface Roughness | N/A | 0.141 | OK | ||||
| Dielectric Thickness | N/A | 264 | OK | ||||
| Visual | Ceramic Coating | N/A | PASS | OK | |||
| AL-Base | N/A | PASS | OK | ||||
| Function | Insulation Resistance | N/A | >50 | OK | |||
| Chucking Force | N/A | >3000 | OK | ||||
| Leakage Current | N/A | <8 | OK | ||||
