AMAT TXZ HATER
AMAT Endura2 TXZ Heater 12"
2nd New or Repair
2nd New or Repair
| Check Item | Resistance | Insulation | Insulation | |||||||||
| Spec. | IN | 22Ω±10% | 100㏁ Over -500V(DC) (Heater and puck) |
100㏁ Over - 500V(DC) (In Heater and Out Heater) |
||||||||
| OUT | 22Ω±10% | |||||||||||
| Result | IN | 22.95 | Ω | 50000.00 | ㏁ | 50000.00 | ㏁ | |||||
| OUT | 23.20 | Ω | 50000.00 | ㏁ | ||||||||
| OK | NG | OK | NG | OK | NG | |||||||
| V | V | V | ||||||||||
| Withstanding Voltage | Leak Check | T/C Resistance | Part Number | |||||||||
| 2㎃ Under (1500V(AC)) |
1.0*10^-10 Pa.m3/s Under |
1Ω Over | 0010-28715 0040-91179 |
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| 0.48 | ㎃ | 2.3*10^-10 Pa.m3/s |
1 | 21.00 | Ω | |||||||
| 0.53 | ㎃ | 2 | 20.50 | Ω | ||||||||
| OK | NG | OK | NG | OK | NG | |||||||
| V | V | V | ||||||||||
